SUP-FTM210 Micro Mass Flowmeter for Precision Gas Flow Measurement from 1 mL/min to 200 L/min

The FTM210 is a compact, high-performance micro mass flowmeter engineered around an advanced MEMS (Micro-Electro-Mechanical Systems) thermal dispersion sensor. Designed for industrial gas flow measurement, it delivers ±2.0% FS accuracy with an ultra-fast ≤10 ms response time across a wide turndown ratio of 100:1. With multiple output options including 4–20 mA, voltage, and RS485 Modbus-RTU, the FTM210 integrates seamlessly into modern process control systems.

Characteristics

  • MEMS Thermal Dispersion Technology

  •  ±2.0% FS Accuracy

  • ≤10 ms Fast Response Time

  • 100:1 Wide Turndown Ratio

  • Flow Range: 1 mL/min – 200 L/min

  • RS485 Modbus-RTU Communication

  • Compact & Lightweight Design

  • IP40 Protection Rating

  • Product Overview

The FTM210 micro mass flowmeter is an electronic gas mass flow measuring instrument based on a Micro-Electro-Mechanical Systems (MEMS) flow-sensing chip. Designed specifically for industrial applications, the flowmeter integrates multiple anti-interference designs with a highly compatible system architecture. It supports various signal output options and enables network-based management through standard communication interfaces.

Featuring a compact size, lightweight construction, and high measurement accuracy, the FTM210 offers outstanding performance, ease of installation, and low maintenance requirements, along with excellent long-term stability and reliability. It is widely deployed in gas measurement and monitoring applications across industries such as medical equipment, oil and gas, chemical processing, and energy.

 

  • Key Features

Compact & Lightweight Design
The simplified structure with miniature dimensions and lightweight housing enables installation in space-constrained environments where traditional flowmeters cannot fit.

Wide Flow Range with High Accuracy
Covers flow rates from 1 mL/min to 200 L/min across eight selectable ranges with ±2.0% FS accuracy and 100:1 turndown ratio, meeting diverse application requirements.

Ultra-Fast Response Time
With a response time of ≤10 ms, the FTM210 captures rapid flow transients and enables real-time process control in dynamic measurement scenarios.

Linear Output – No Compensation Required
The integrated transmitter circuit provides linearized output signals directly proportional to mass flow rate, eliminating the need for additional temperature or pressure compensation.

Intuitive LCD Display with 180° Rotation
The OLED display provides clear, intuitive flow readings and supports 180° vertical rotation, ensuring optimal visibility in any installation orientation.

Multiple Output Options
Supports 4–20 mA, 0–20 mA current output, 1–5 V / 0–5 V / 0.5–4.5 V voltage output, RS485 Modbus-RTU digital communication, and NPN alarm output — meeting diverse integration requirements.

 

  • Measuring Principle

The FTM210 operates on the principle of thermal mass flow measurement, which is based on the fundamental relationship between heat transfer and gas mass flow. By detecting temperature variations generated upstream and downstream of the MEMS sensor, the mass flow rate of the gas can be determined with high precision.

The flowmeter integrates both a micro-heating element and temperature sensing elements on a single MEMS chip. When the chip is in operation, a stable thermal field is established around the sensor. As gas flows through the sensor, the gas mass flow disturbs this thermal field, creating a specific temperature distribution that depends on the gas mass flow rate and velocity.

The MEMS sensors detect these temperature changes and convert them into electrical signals. A dedicated transmitter circuit then amplifies, conditions, and linearizes the signals. Because gases with different mass flow rates produce different degrees of thermal disturbance around the sensor, the flowmeter can accurately measure the gas mass flow rate or totalized flow without the need for additional pressure or temperature compensation.

 

  • Technical Specifications
Measured variables mass flow
Flow range (1~100) mL/min, (5~500) ml/min, (10~1000) ml/min, (20~2000) ml/min, (0.2~20) L/min, (0.5~50) L/min, (1 ~ 100) L/min , (2~200) L/min
Range ratio 100:1
Accuracy ±2.0%FS
Resolution 0.1%FS
Repeatability 1%FS
Response time 10ms
Transmitter output Current output: (4~20) mA or (0~20) mA ; output load 650Ω
Voltage output: ( 1 ~ 5 ) V / ( 0 ~ 5 ) V / ( 0.5 ~ 4.5 ) V; output impedance approximately 1kΩ
Communication RS485 interface, MODBUS-RTU
Alarm output NPN alarm output
Power supply (9~24) VDC Note: When using current output, a 24V DC power supply must be used.
Operating current 60mA
Electrical interface GH1.25-5 Pin
Media type Air, nitrogen, oxygen, argon, and carbon dioxide
Process pressure 1MPa
Temperature 0 ~ 50
Humidity 35%~85% RH (no condensation, no freezing)
Storage temperature -20~ 70
Protection level IP40

 

  • Applications

The FTM210 micro mass flowmeter is widely used in gas measurement and monitoring applications across multiple industries:

Medical Equipment
Precise gas flow measurement for respiratory devices, anesthesia systems, and laboratory analytical instruments where accuracy and reliability are critical.

Oil & Gas
Monitoring and control of gas flow in extraction, refining, and distribution processes, ensuring operational efficiency and safety compliance.

Chemical Processing
Accurate measurement of process gases in chemical reactors, blending systems, and quality control applications, supporting process optimization and regulatory compliance.

Energy & Power
Gas flow monitoring in fuel cell systems, combustion control, and energy management applications, enabling efficient resource utilization.

Semiconductor & Electronics
Ultra-precise gas flow control in cleanroom environments, gas delivery systems, and wafer fabrication processes.

Environmental Monitoring
Emission gas measurement and air quality monitoring systems for environmental compliance and reporting.

 

  • Frequently Asked Questions

Q: What is a micro mass flowmeter and how does it work?
A: A micro mass flowmeter is a compact gas flow measurement instrument that uses thermal dispersion technology via a MEMS (Micro-Electro-Mechanical Systems) sensor chip. It measures gas mass flow directly by detecting temperature variations caused by gas flow around a heated sensor element, without requiring additional pressure or temperature compensation.

Q: What gases can the FTM210 measure?
A: The FTM210 supports measurement of air, nitrogen (N₂), oxygen (O₂), argon (Ar), and carbon dioxide (CO₂). Custom gas coefficients can also be configured for other gases.

Q: What is the difference between mass flow and volumetric flow?
A: Mass flow measures the actual mass of gas passing through per unit time (e.g., g/min, kg/h), while volumetric flow measures the volume (e.g., mL/min, L/min). Mass flow measurement is independent of temperature and pressure variations, providing more accurate and consistent results for process control.

Q: What communication protocol does the FTM210 support?
A: The FTM210 supports RS485 communication with the Modbus-RTU protocol, with configurable baud rates of 9600, 19200, 38400, and 57600 bps. It provides access to instantaneous flow rate, totalized flow, temperature, and device configuration parameters.

Q: Can the FTM210 be used in explosion-proof environments?
A: No. The FTM210 is not designed for use in explosion-proof or hazardous area applications. It carries an IP40 protection rating and is suitable for general industrial indoor environments.

Q: What is the turndown ratio of the FTM210?
A: The FTM210 offers a 100:1 turndown ratio, allowing accurate measurement across a wide flow range within each selected range option.

Q: How is the FTM210 powered?
A: The FTM210 operates on 9–24 V DC power supply. When using the 4–20 mA current output, a 24 V DC power supply is required. The operating current is ≤60 mA.

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